Ko te hangarau tapahi waea taimana e mōhiotia ana ko te hangarau tapahi whakakoi whakakotahi. Ko te tikanga here hiko, here kapia rānei, ko te whakakoi taimana kua whakakoihia ki te mata o te waea rino, ka mahi tika te waea taimana ki te mata o te tokotoko silicon, te ingot silicon rānei hei huri, kia tutuki ai te hua tapahi. Ko ngā āhuatanga o te tapahi waea taimana ko te tere tapahi, te tika tapahi teitei, me te iti o te ngaronga rauemi.
I tēnei wā, kua tino whakaaetia te mākete karaihe kotahi mō te tapahi waea taimana i te anga silicon, engari kua tūtaki anō hoki i roto i te tukanga whakatairanga, ko te ma weriweri te raruraru tino noa. Nā reira, ka arotahi tēnei pepa ki te ārai i te raruraru tapahi waea taimana i te anga silicon monocrystalline ma weriweri.
Ko te tukanga horoi o te wafer silicon monocrystalline tapahi waea taimana ko te tango i te wafer silicon i tapahia e te taputapu mīhini kani waea mai i te pereti kapia, tangohia te rīpene rapa, ka horoia te wafer silicon. Ko te taputapu horoi he mīhini horoi-mua (mīhini tango kapia) me te mīhini horoi. Ko te tukanga horoi matua o te mīhini horoi-mua ko: whāngai-rehu-rehu-horoi ultrasonic-tango kapia-horoi wai ma-whāngai kore. Ko te tukanga horoi matua o te mīhini horoi ko: whāngai-horoi wai parakore-horoi wai parakore-horoi kawakawa-horoi kawakawa-horoi wai parakore-horoi wai parakore-whakamaroke i mua (hikinga puhoi)-whakamaroke-whāngai.
Ko te kaupapa o te hanga weriweri kotahi-kiriata
Ko te papara silicon monocrystalline te āhuatanga o te waikura anisotropic o te papara silicon monocrystalline. Ko te kaupapa tauhohenga ko te whārite tauhohenga matū e whai ake nei:
Si + 2NaOH + H2O = Na2SiO3 + 2H2↑
Ko te tikanga, ko te tukanga hanganga hiako he: Ko te otinga NaOH mō te tere waikura rerekē o te mata tioata rerekē, (100) te tere waikura o te mata i te (111), nō reira (100) ki te anga silicon monocrystalline i muri i te waikura anisotropic, ka hangaia ki te mata mō te (111) te kōne taha-whā, arā, te hanganga "piramid" (e whakaaturia ana i te pikitia 1). I muri i te hanganga o te hanganga, ina pā te mārama ki te pari piramid i tētahi koki, ka whakaatahia te mārama ki te pari i tētahi koki kē, ka hanga he mimiti tuarua, he nui ake rānei, ka whakaitihia te whakaata i runga i te mata o te anga silicon, arā, te pānga mahanga mārama (tirohia te Pikitia 2). Ko te pai ake o te rahi me te ōritetanga o te hanganga "piramid", ko te kitea ake o te pānga mahanga, ā, ko te iti iho o te putanga o te mata o te anga silicon.
Pikitia 1: Te āhua iti o te anga silicon monocrystalline i muri i te hanga kawakore
Pikitia 2: Te kaupapa mahanga mārama o te hanganga "piramita"
Te tātaritanga o te mā o te karaihe kotahi
Mā te karu hiko matawai i runga i te papa kiritona ma, i kitea ko te hanganga piramita o te papa kiritona ma i te rohe kāore i te tino hangaia, ā, te āhua nei he paparanga toenga "waxy" kei te mata, engari ko te hanganga piramita o te hiako hiako i te rohe ma o te papa kiritona kotahi i pai ake te hanganga (tirohia te Pikitia 3). Mena he toenga kei runga i te mata o te papa kiritona monocrystalline, ka nui te hanganga "piramita" o te mata, ka rite te rahi, ā, ka kore e ranea te pānga o te rohe noa, ka nui ake te whakaata o te mata weriweri i te rohe noa, ko te rohe he whakaata teitei ki te rohe noa i roto i te tirohanga ka whakaatahia he ma. E kitea ana i te āhua tohatoha o te rohe ma, ehara i te āhua auau, i te āhua noa rānei i roto i te rohe nui, engari i roto i ngā rohe noa. Me kī kāore anō kia horoia ngā poke o te mata o te papa kiritona, nā te poke tuarua rānei te āhua o te mata o te papa kiritona.
Pikitia 3: Te whakataurite i ngā rerekētanga hanganga moroiti ā-rohe i roto i ngā papa silicon ma weruweru
He maeneene ake te mata o te anga silicon tapahi waea taimana, ā, he iti ake te pakaru (e whakaaturia ana i te Pikitia 4). Ki te whakatauritea ki te anga silicon moata, he puhoi ake te tere tauhohenga o te mata o te alkali me te mata o te anga silicon tapahi waea taimana i te anga silicon monocrystalline tapahi moata, nō reira he mārama ake te awe o ngā toenga mata ki te pānga weriweri.
Pikitia 4: (A) Kauwhata mata o te papa silicon tapahi moata (B) kauwhata mata o te papa silicon tapahi waea taimana
Ko te pūtake toenga matua o te mata o te anga silicon tapahi waea taimana
(1) Whakamatao: ko ngā wāhanga matua o te whakamatao tapahi waea taimana ko te surfactant, te dispersant, te defamagent me te wai me ētahi atu wāhanga. Ko te wai tapahi he pai te mahi, he pai te whakatārewatanga, te horapa me te ngāwari ki te horoi. Ko ngā surfactant he pai ake te āhua hydrophilic, he ngāwari ki te horoi i roto i te tukanga horoi wafer silicon. Ko te whakaoho tonu me te rere o ēnei tāpiringa ki roto i te wai ka puta he nui o te pahuka, ka hua ake te hekenga o te rere o te whakamatao, ka pā ki te mahi whakamatao, me ngā raruraru pahuka nui me te pahuka waipuke, ka tino pā ki te whakamahinga. Nō reira, ko te whakamatao te nuinga o te wā e whakamahia ana me te kaihoko dehump. Hei whakarite i te mahi dehump, ko te silicone me te polyether tuku iho he ngoikore te hydrophilic. He tino ngāwari te mimiti i te whakarewa i roto i te wai, ā, ka noho tonu ki runga i te mata o te wafer silicon i te horoinga o muri mai, ka hua ake te raruraru o te ira mā. Ā, kāore i te tino hototahi ki ngā wāhanga matua o te wai whakamatao, nō reira, me hanga kia rua ngā wāhanga, ko ngā wāhanga matua me ngā kaihoko whakakore huka i tāpirihia ki te wai, i roto i te tukanga whakamahinga, i runga i te āhua o te pahuka, kāore e taea te whakahaere i te whakamahinga me te horopeta o ngā kaihoko ārai pahuka, ka taea te tuku i te nui rawa o ngā kaihoko anoaming, ka piki ake ngā toenga mata o te anga silicon, he uaua ake hoki te whakahaere, heoi, nā te iti o te utu o ngā rauemi mata me ngā rauemi mata o te kaihoko whakakore huka, nō reira, ko te nuinga o ngā wai whakamatao o te whare e whakamahi ana i tēnei pūnaha tātai; ko tētahi atu wai whakamatao e whakamahi ana i tētahi kaihoko whakakore huka hou, ka taea te hototahi pai ki ngā wāhanga matua, kāore he tāpiri, ka taea te whakahaere pai me te rahinga, ka taea te ārai i te whakamahinga nui, he tino watea hoki te mahi i ngā mahi, mā te tukanga horoi tika, ka taea te whakahaere i ōna toenga ki ngā taumata tino iti, i Hapani me ētahi kaihanga o te whare e whakamahi ana i tēnei pūnaha tātai, heoi, nā te nui o te utu o ngā rauemi mata, kāore i te kitea tōna painga utu.
(2) Putanga piri me te kapia: i te wāhanga whakamutunga o te tukanga tapahi waea taimana, kua tapahia te anga silicon e tata ana ki te pito e haere mai ana i mua, kāore anō kia tapahia te anga silicon i te pito putanga, kua tīmata te waea taimana kua tapahia tuatahi ki te paparanga rapa me te pereti kapia, nā te mea he hua kapia epoxy te piri rakau silicon me te papa kapia, ko tōna ira whakangawari kei waenganui i te 55 me te 95℃. Mena he iti te ira whakangawari o te paparanga rapa, o te pereti kapia rānei, ka tere te wera i te wā e tapahia ana, ka ngawari, ka rewa. Ka piri ki te waea maitai me te mata o te anga silicon, ka heke te kaha tapahi o te raina taimana, ka tangohia rānei ngā anga silicon ka pania ki te kapia. Kia piri, he tino uaua ki te horoi atu. Ko te nuinga o te wā ka puta te poke tata ki te taha o te anga silicon.
(3) paura silicon: i te wā e tapahia ana te waea taimana ka nui te paura silicon ka puta. I te tapahi, ka nui haere te ihirangi paura whakamatao moata. Ina nui te paura, ka piri ki te mata silicon. Nā te tapahi waea taimana i te rahi me te rahi o te paura silicon, ka māmā ake te mimiti ki te mata silicon, ka uaua ai te horoi. Nō reira, kia mau tonu te kounga me te kounga o te wai whakamatao, kia iti ake ai te ihirangi paura i roto i te wai whakamatao.
(4) te horoi: ko te whakamahinga o ngā kaihanga tapahi waea taimana i ēnei rā ko te nuinga o te whakamahi i te tapahi moata i te wā kotahi, ko te nuinga o te whakamahi i te tapahi moata i mua i te horoi, te tukanga horoi me te kaihoko horoi, me ētahi atu. Ko te hangarau tapahi waea taimana kotahi mai i te tikanga tapahi, ka hangaia he huinga katoa o te raina, he rerekētanga nui te tapahi whakamatao me te moata, nō reira ko te tukanga horoi e rite ana, te horopeta o te kaihoko horoi, te tātai, me ētahi atu me whakarite kia rite mō te tapahi waea taimana. He mea nui te kaihoko horoi, ko te tātai taketake o te kaihoko horoi he surfactant, kāore e pai te alkalinity mō te horoi i te waea taimana te tapahi i te wafer silicon, me whakarite kia rite ki te mata o te wafer silicon waea taimana, kia rite ki te hanganga me ngā toenga mata o te kaihoko horoi kua tohua, me te tango tahi me te tukanga horoi. E ai ki te kōrero i runga ake nei, kāore e hiahiatia te hanganga o te kaihoko whakakore huka i roto i te tapahi moata.
(5) Wai: i te tapahi waea taimana, i mua i te horoi me te horoi, kei roto i te wai puhake ngā poke, ka taea te piri ki te mata o te anga silicon.
Whakaitihia te raruraru o te hanga i te makawe weriweri kia mā
(1) Hei whakamahi i te wai whakamatao me te marara pai, me whakamahi te wai whakamatao i te kaihoko whakakore huka iti-toenga hei whakaiti i te toenga o ngā wāhanga wai whakamatao i runga i te mata o te anga silicon;
(2) Whakamahia he kāpia me he pereti kapia e tika ana hei whakaiti i te parahanga o te papa silicon;
(3) Ka whakaranua te wai whakamatao ki te wai parakore kia kore ai he paru e toe ana i roto i te wai kua whakamahia;
(4) Mō te mata o te anga silicon kua tapahia ki te waea taimana, whakamahia he kaihoko horoi e tika ana mō te mahi me te pānga horoi;
(5) Whakamahia te pūnaha whakaora ipurangi mō te whakamatao raina taimana hei whakaiti i te nui o te paura silicon i roto i te tukanga tapahi, kia pai ai te whakahaere i te toenga o te paura silicon i runga i te mata o te papa silicon o te papa. I taua wā anō, ka taea hoki te whakanui ake i te pāmahana wai, te rere me te wā i roto i te horoinga o mua, kia tino horoia ai te paura silicon i te wā tika.
(6) Kia whakatakotoria te papa silicon ki runga i te tēpu horoi, me rongoa tonu, ā, me pupuri kia mākū te papa silicon i te wā katoa o te horoinga.
(7) Mā te papa silicon e pupuri te mata kia mākū i te wā e tangohia ana te kapia, ā, kāore e maroke noa iho. (8) I te wā e horoia ana te papa silicon, ka taea te whakaiti i te wā e pāngia ana e te hau kia kore ai e puta he pua ki te mata o te papa silicon.
(9) Kaua ngā kaimahi horoi e pā tika ki te mata o te anga silicon i te wā katoa o te horoinga, ā, me mau karapu rapa, kia kore ai e puta he tānga tapumati.
(10) Hei tohutoro [2], ka whakamahia e te pito pākahiko te tukanga horoi hauwai peroxide H2O2 + alkali NaOH e ai ki te ōwehenga rōrahi o te 1:26 (3% otinga NaOH), ka taea te whakaiti i te putanga mai o te raruraru. He rite tōna kaupapa ki te otinga horoi SC1 (e mōhiotia whānuitia ana ko te wai 1) o te wafer silicon semiconductor. Ko tōna tikanga matua: ko te kiriata whakahāngai i runga i te mata o te wafer silicon ka hangaia e te whakahāngai o te H2O2, ka waikurahia e te NaOH, ā, ka puta te whakahāngai me te waikura i ngā wā katoa. Nō reira, ko ngā matūriki e piri ana ki te paura silicon, te kapia, te konganuku, me ētahi atu) ka taka hoki ki roto i te wai horoi me te paparanga waikura; nā te whakahāngai o te H2O2, ka pakaru te mea rauropi i runga i te mata o te wafer ki te CO2, H2O ka tangohia. Ko tēnei tukanga horoi kua whakamahia e ngā kaihanga wafer silicon tēnei tukanga hei tukatuka i te horoinga o te wafer silicon monocrystalline tapahi waea taimana, te wafer silicon i roto i te whare me Taiwan me ētahi atu kaihanga pākahiko e whakamahi ana i te weruweru mā. Kei reira anō hoki ngā kaihanga pākahiko kua whakamahi i te tukanga horoi-mua weruweru rite, ā, he pai hoki te whakahaere i te āhua o te weruweru mā. Ka kitea te tāpiri o tēnei tukanga horoi ki te tukanga horoinga o te papa silicon hei tango i te toenga o te papa silicon kia pai ai te whakatau i te raruraru o te makawe mā i te pito pākahiko.
whakatau
I tēnei wā, kua noho te tapahi waea taimana hei hangarau tukatuka matua i roto i te mara o te tapahi karaihe kotahi, engari i roto i te tukanga whakatairanga i te raruraru o te hanga ma te weriweri kua whakararuraru i ngā kaihanga wafer silicon me ngā pākahiko, ā, ka arahi ngā kaihanga pākahiko ki te tapahi waea taimana i te wafer silicon he ātete. Mā te tātari whakatairite i te rohe mā, ko te nuinga o te take he toenga i runga i te mata o te wafer silicon. Hei pai ake te ārai i te raruraru o te wafer silicon i roto i te pūtau, ka tātarihia e tēnei pepa ngā pūtake pea o te parahanga mata o te wafer silicon, me ngā whakaaro whakapai ake me ngā mahi i roto i te whakaputanga. E ai ki te maha, te rohe me te āhua o ngā ira mā, ka taea te tātari me te whakapai ake i ngā take. He tino taunaki kia whakamahia te tukanga horoi hauwai peroxide me te kawakore. Kua whakamātauhia e te wheako angitu ka taea e ia te ārai pai i te raruraru o te tapahi waea taimana i te wafer silicon ki te hanga ma te weriweri, hei tohutoro mā ngā kaimahi whānui o te umanga me ngā kaihanga.
Wā tuku: Mei-30-2024